WELCOME TO THE
ADVANCED MICROSYSTEMS LABORATORY
MEMS, or Micro-Electro Mechanical Systems, are integrated
micro devices or integrated systems combining both electrical and mechanical
components. Typical examples of MEMS devices are sensors (pressure, velocity), microactuators (micro-mirrors, switches). Important
characteristics of MEMS are their sub-millimeter size along with parallel mass
production, based on photolithography and integrated circuit (IC) processing
technology.
Recently MEMS has become increasingly popular in many
areas of science and engineering and current applications include
micro-actuators, accelerometers, biosensors, pressure, chemical, motion and
flow sensors, micro-optics, optical scanners, projection display chip, ink jet
nozzle arrays, and fluid pumps and valves.
The Advanced Microsystems Laboratory specializes in the
development of microactuators and sensors based on
electrostatic and thermal phenomenon. Electroactive
polymer actuators are an exception, where ionic transport is used to achieve
actuation. Besides this, Advanced Microsystems Laboratory is involved in
general control and instrumentation projects. Recently, it has also started
dealing with projects in the emerging field of nanotechnology.
Aerospace & Mechanical Engineering
The
1130 N. Mountain, Room No: N-417 B
Tel: (520)-626-6652